3D Scatterometry on arbitrary STL formatted shape

Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2025-06-08
Primary Topic
Ion-surface interactions and analysis
Type
article
Field-Weighted Citation Impact
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article

3D Scatterometry on arbitrary STL formatted shape

SPIRE - Sciences Po Institutional REpository
Ion-surface interactions and analysis
article

3D Scatterometry on arbitrary STL formatted shape

article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Openalex Percentile: Top 41%
Ion-surface interactions and analysis
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3D Scatterometry on arbitrary STL formatted shape · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS