On the Correctness of the Model Description of Plasma Composition in an SF6 + He + O2 Mixture

A comprehensive (experimental and model) study of the composition of the neutral and charged components of an SF6 + He + O2 plasma is conducted by varying the He/O2 ratio. Key plasma-chemical processes that form steady-state concentrations of fluorine and oxygen atoms under conditions of excess fluorine-containing particles are identified. It is shown that the adjusted (refined based on the results of recent work and supplemented with previously unaccounted for processes) kinetic scheme ensures satisfactory agreement between the calculated atomic concentrations and the values obtained from the results of optical-spectral diagnostics of the plasma.