On the Influence of Various Oxygen-Containing Gases on the Composition of Trifluoromethane Plasma

A model study of the composition of the neutral component of plasma in CHF3 + O2, CHF3 + CO and CHF3 + CO2 mixtures was conducted under conditions of an inductive 13.56 MHz discharge excited at a constant pressure (6 mTorr) and input power (700 W). It is shown that the influence of CO and CO2 additives differs significantly from the classical effect of oxygen, which is accompanied by a sharp increase in chemical activity and a decrease in the polymerization capacity of the plasma. The reliability of the obtained data is confirmed by satisfactory agreement between the calculated concentrations of fluorine atoms and the results of the actinometric experiment.