Enhanced binding of (3-Aminopropyl) triethoxysilane to polymer brush-coated surfaces by controlled activation: degradation, activation, and functionalization

Polymer brushes are widely used to control the surface chemistry of substrates and selectively block or allow metal deposition on samples. Polymer brushes have advantages such as the possibility of conformal coatings and chemical binding tosurfaces, thus improving stability. Despite progress in the application of polymer brushes such as poly(methyl methacrylate) (PMMA) and polystyrene (PS) for area-selective deposition (ASD), brush removal and activation have not been widely investigated. Herein, we present a method to fabricate a stacked brush APTS-PS or APTS-PMMA composite and investigate brush removal with UV ozone (UVO) treatment and oxygen plasma ashing. We believe this work will lead to improved processing of brushes and allow for the advancement of the ASD field.