Integration of micro-fabricated thermal flow rate sensors in a 4H-SiC substrate passivated by a MPECVD-grown diamond layer

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Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2024-09-01
Primary Topic
Diamond and Carbon-based Materials Research
Type
article
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article

Integration of micro-fabricated thermal flow rate sensors in a 4H-SiC substrate passivated by a MPECVD-grown diamond layer

SPIRE - Sciences Po Institutional REpository
Diamond and Carbon-based Materials Research
article

Integration of micro-fabricated thermal flow rate sensors in a 4H-SiC substrate passivated by a MPECVD-grown diamond layer

article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Centre de Nanosciences et de Nanotechnologies (FR), Laboratoire d'électronique, systèmes de communication et microsystèmes (FR)
Openalex Percentile: Top 66%
Diamond and Carbon-based Materials Research
OpenAlex
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Integration of micro-fabricated thermal flow rate sensors in a 4H-SiC substrate passivated by a MPECVD-grown diamond layer · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS