Impact of Doped Polysilicon Process for Mass Production TOPCon Solar Cell

Tunnel oxide passivated contact solar cells have gradually become a mass-producible solar cell technology due to their excellent performance with cost-effectiveness, and further superimposing other technologies to improve conversion efficiency has become the focus of subsequent research. Heavy doping is usually required to achieve excellent field effect passivation and low contact resistivity in doped polysilicon (poly-Si). In order to increase the throughput, the poly-Si process improvements are needed. During this process, it could be found that as the temperature increases, more nanocrystalline structures will form on the surface of the poly-si layer. In this study, the electrical properties and reliability of different doped poly-si films were studied. Finally, industrial-sized (G10-L) TOPCon solar cells were fabricated on a production line with an average efficiency of 25.95%, 0.15% higher than the Baseline solar cells of 25.8%. The above results suggest that nano crystallization may be helpful for passivation, thereby obtaining efficient solar cells.