Investigation of the accuracy of a robotic-complex-based technical implementation of angle-resolved scattering

Subject of study. This study is focused on the technical implementation of the angle-resolved scattering (ARS) method in the form of a robotic complex for quality control of optical surfaces with subnanometer roughness. Aim of study. The aim is to determine the angular positioning error of a robotic complex wrist when implementing the ARS method in roughness measurement tasks. In addition, the effect of this error on the results of surface roughness measurements is estimated. Method. The method involves experimental determination of the angular positioning error and mathematical modeling-based estimation of the influence of the measured error. Main results. An original scheme for the technical implementation of the ARS method based on a robotic complex is presented. The angular repeatability of the end positions of the robotic manipulators is determined. In addition, the angular positioning error and its effect on the measurement results are investigated. Practical significance. The determined accuracy of the proposed technical ARS implementation is expected to contribute to the development of a finished product—an optoelectronic complex for optical surface quality control via measurement of surface roughness at the angstrom level.