Development of a compact high voltage pulse power supply of MARX-type for muon linac klystron

We have been developing a compact pulse power supply with output pulse waveform specifications of 75kV/40A/50us/25Hz. This power supply is used to drive klystron for muon linac, which requires high stability and reliability. Next-generation power semiconductor SiC-MOSFETs with excellent characteristics of ultra-high breakdown voltage and low loss at 13kV, which were realized through the technological development of wide bandgap semiconductor devices, are used. Combining this SiC-MOSFET with the MARX circuit will realize a more compact pulse power supply with lower loss than conventional ones. In addition, it can be applied to portable accelerators in the future. In this presentation, the circuit design of the MARX power supply will be reported.