Development of residual gas analyzer measurement system capable of operating in the 10 Torr vacuum range

Residual Gas Analyzers (RGA) are widely used to mon-itor gas composition in vacuum systems. However, they are typically limited to high-vacuum environments and cannot be used directly in processes that operate at higher pressures. To solve this problem, we developed a modular and easy-to-build differential pumping system that allows an RGA to monitor vacuum environments up to 10 Torr. In this study, we present the design of this system. Thanks to its modular design, the system can be easily extended to operate at higher working pressures by adding more modules.