Preparation and physico-chemical characterization of AISI 304 stainless steel film deposited by DC magnetron sputtering

The present study reports on the preparation and physico-chemical investigation of a 2 μm thick film produced from AISI 304 stainless steel by DC magnetron sputtering. A phase transformation from the conventionally non-magnetic Face-Centered Cubic (FCC) phase of austenite (γ-Fe) nature to a predominantly Body-Centered Cubic (BCC) ferromagnetic single phase (α-Fe) during the deposition is observed upon the deposition process. The deposited films are characterized by various experimental techniques including Scanning Electron Microscopy (SEM) with Energy-Dispersive X-ray spectroscopy (EDX), X-Ray powder Diffraction (XRD), Grazing-Incidence X-Ray powder Diffraction (GIXRD), and M¨ossbauer Spectroscopy (MS) in both transmission and back-scattered geometry. For interpretation of the M¨ossbauer spectra of the film, a physico-chemical model based on distinct micromagnetic environments evolved due to alloying elements is suggested. The results, presented within this study, may stimulate further and detailed research in identifying the causes for the phase transition from both theoretical and experimental perspectives and understanding the underlying mechanisms.