A Fully Depleted 52 μm GS CIS Pixel with 6 ns Charge Transfer, rms Read Noise, 80 μV/e- CG and >80 % VIS-QE

Imec is developing a CMOS compatible image sensors. Full depletion allows enhancement of the charge collection speed in photodetectors. A 48x48 pixel test array with 52 μm pitch has been developed in this technology. An initial evaluation is presented in this paper. The device achieves 7 e-rms read noise at 80 μV/e- conversion gain. The mean charge transfer time is estimated to 6 ns. QE in the visible is expected to be >80 %.