Pulsed heating atomic layer deposition of TiO2 thin films on soft substrates

Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2025-06-02
Primary Topic
Semiconductor materials and devices
Type
article
Field-Weighted Citation Impact
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article

Pulsed heating atomic layer deposition of TiO2 thin films on soft substrates

SPIRE - Sciences Po Institutional REpository
Semiconductor materials and devices
article

Pulsed heating atomic layer deposition of TiO2 thin films on soft substrates

article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Openalex Percentile: Top 49%
Semiconductor materials and devices
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Pulsed heating atomic layer deposition of TiO2 thin films on soft substrates · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS