Heat Transfer and Actuation Performance of Multi-Array V-Shaped MEMS Electrothermal Actuators in Air

This study investigates how element spacing affects the heat transfer and actuation performance of multi-array V-shaped electrothermal actuators (ETAs) in air environments. A visualization experimental platform combining infrared thermal imaging and high-speed microscopic imaging was established to analyze different element spacings under three conditions: identical maximum temperature, input voltage, and input power. Results revealed that smaller element spacings exhibit superior thermal efficiency, achieving higher temperatures and displacement outputs under identical conditions; while larger element spacings demonstrate faster dynamic response and more uniform temperature distribution. A validated multi-field coupling model integrating electrical, thermal, fluid, and structural domains extends the analysis across a broader range of spacings, revealing the underlying mechanisms governing heat accumulation and dissipation. The findings highlight the dual role of air as both a coupling medium and dissipation pathway, and provides valuable theoretical foundation and practical guidance for optimizing ETA design to address various working conditions.[2025-0113]