A Prediction Method for Three-Demensional Thermo-Mechanical Behavior in Vertically Stacked-NAND Flash Memory Structures using Two-Demensional Axisymmetric Elements

This paper proposes a novel polynomial-based method to rapidly predict three-dimensional (3D) thermo-mechanical responses in vertically stacked-NAND flash memory structures, based on results from two-dimensional axisymmetric finite element analysis (FEA).Two orthogonal planes provide displacement and strain data at eight boundary nodes.A dimensionless local coordinate system is defined for each element to construct a 16-term polynomial displacement field, from which a corresponding linear system is formulated to determine the interpolation coefficients.These coefficients are used to estimate displacements, strains, and stresses at internal points, eliminating the need for a full 3D FEA.Visualization surface plots demonstrate that interpolated fields closely match full 3D FEA results, with maximum prediction errors below 5 %.The proposed method significantly reduces computational cost while maintaining high accuracy, making it an efficient tool for multi-scale thermo-mechanical analysis.