Design, Simulation, and Analysis of S-shaped Nanobeam-based Multi-directional Inertial Sensor

Inertial sensors are used to measure the change of momentum along with the applied acceleration force across various applications, such as biomedical, defense, automobile, and robotics. Accelerometers and gyroscopes, together, constitute inertial sensors. Over the past few decades, these sensors have been widely used for several engineering applications. This work proposes a Micro-Electro-Mechanical Systems (MEMS)-based device for sensing inertia. The designed structure incorporates a proof mass to measure displacements caused by inertial forces during linear and rotational motion, making it a candidate for patenting. The designed structure employs proof mass, which could be used to measure displacements due to inertia under linear and rotational moments, which can be patented. Modelling and simulations of the sensor are carried out using COMSOL Multiphysics(R) software. Multi-physics simulations are carried out on the model to evaluate the device's performance under applied linear and angular momentum. The sensor demonstrates high sensitivity, as shown in the simulation results. Finally, the efficacy of the inertial sensor and its potential for future improvements are discussed.