Near‐Sensor Analog Computing via Monolithic 3D Piezoelectric Sensor–FeFET for Tactile Sensing System

Abstract Artificial tactile systems that replicate human tactile perception have garnered attention for use in human–machine interfaces such as prosthetic devices. However, achieving energy‐efficient tactile processing with human‐level capabilities remains challenging due to high power consumption and latency in conventional front‐end circuits. In particular, although piezoelectric sensors offer self‐powered and fast response, they are intrinsically limited in detecting static pressure stimuli. To address this limitation, a monolithic 3D‐integrated near‐sensor analog computing system is presented that co‐designs the sensing and computing architecture. The piezoelectric sensor and metal–ferroelectric–metal–insulator–semiconductor (MFMIS) ferroelectric field‐effect transistor (FeFET) unit cells are integrated into a 3 × 3 array, enabling local analog processing of static and dynamic tactile signals at the sensor node. Leveraging an MFMIS memory window >2.5 V, the unit cell resolves ≥6 static force levels within a force range of 1 N and exhibits 18.3 Pa −1 sensitivity. Furthermore, this array achieves three distinct weights for the kernel under identical input pressure conditions by tuning the capacitance ratio between the dielectric and ferroelectric layers, enabling real‐time noise reduction with a static power consumption of approximately 10 nW without external interface circuits. Ultimately, these findings demonstrate the potential of piezoelectric‐ and ferroelectric‐based near‐sensor analog computing for next‐generation energy‐efficient tactile processing platforms.