Tapered Slot Antenna Formed on SiC Surface by Plasma Processing

This work is devoted to the development and study of the Vivaldi antenna and the method for forming such an antenna on the surface of silicon carbide by the method of plasma interaction with the surface in a fluoride and oxygen plasma environment. Experimental studies on the formation of a graphene-like conductive surface are shown; under the specified conditions, the thickness of the conductive graphene-like layer was estimated at 120 nm. The Vivaldi antenna in a form of a graphene-like conductive layer etched in a 250 μm thick SiC substrate is designed and numerically studied. The operating frequency range is from 73.5 GHz to 89 GHz (percentage bandwidth 19%), covering both automotive long range and short-range radar bands and industrial fluid level sensing bands. The antenna radiation efficiency in these bands exceeds 89%. This device, made with this technology, can be used in liquid level sensors for automobiles and industrial applications. All manufacturing processes used are standard microelectronics processes.