Energy and Angular Distributions of Scattered Ar+ Ions with a Blue Phosphorus Surface at Sliding Angles

This article presents the theoretical results of energy and angular distributions of Ar+ ions from the surface of blue phosphorus at a small value of the angle of incidence and initial energy receiving by computer simulation method. It is shown that at a small value of the initial energy of ions from the trajectory of scattered ions it is possible to obtain the general shape of the surface semichannel. Moreover, increasing the value of the initial energy makes it possible to obtain the full shape of the semichannel, as well as the shadow behind the semichannel, which provides information on the location of the atom of the second layer. It is established that in the energy distribution due to an increase in the value of the initial energy a multi-peak structure is formed. This makes it possible to determine the surface structure. The obtained angular distribution shows that there is a specular and multiple scattering of ions from the target.