Optimal design of a pigeon-inspired compliant mechanism for flying-vision-based calibration

Abstract Flying-vision-based calibration (FVC) guarantees the alignment accuracy of laser direct imaging for digital lithography. Unfortunately, disturbances to the flexible substrate via warping reduce the FVC accuracy. A pigeon-inspired bionic compliant mechanism (BioCM) is designed to develop a robust FVC system. Two differential lever amplifiers increase the magnification ratio within a compact design domain. A pair of pigeon-inspired multihinge S-type flexible beams reduces the stress during high-frequency focusing steps. The levers and beams are combined into the BioCM. A compliance analysis and structural optimisation approach optimises the BioCM. A flying controller is developed for the flying-photography BioCM. The test results demonstrate that the pigeon-inspired BioCM improves the FVC accuracy when disturbances occur.