Modeling thermal effects in atomic layer deposition for trench-shaped structures

Publication Details

Journal
Chemical Engineering Science
Published
2025-09-27
DOI
https://doi.org/10.1016/j.ces.2025.122683
Citations
1
Primary Topic
Food Security and Health in Diverse Populations
Type
article
Field-Weighted Citation Impact
2.82
Controls
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article

Modeling thermal effects in atomic layer deposition for trench-shaped structures

1 citations
Chemical Engineering Science
Food Security and Health in Diverse Populations
2.82
article

Modeling thermal effects in atomic layer deposition for trench-shaped structures

article en
1 citations

Abstract

No abstract available for this paper.
Chemical Engineering ScienceVol. 321
Openalex Percentile: Top 7%
Food Security and Health in Diverse Populations
2.82
DOIOpen Access PDFOpenAlex
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Modeling thermal effects in atomic layer deposition for trench-shaped structures · Chemical Engineering Science (2025) | TGRS Research Map | TGRS