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Implant simulation details, XRD of implanted and annealed films, elevated PO2 annealing for 5E18 cm-3 implanted samples.

Publication Details

Journal
Figshare
Published
2025-09-16
DOI
https://doi.org/10.60893/figshare.jap.30031927.v1
Primary Topic
Geochemistry and Geologic Mapping
Type
article
Field-Weighted Citation Impact
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Figshare
Geochemistry and Geologic Mapping
article

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article en

Abstract

Implant simulation details, XRD of implanted and annealed films, elevated PO2 annealing for 5E18 cm-3 implanted samples.

Figshare
Openalex Percentile: Top 39%
Geochemistry and Geologic Mapping
DOISourceOpenAlex
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Supplemental Information · Figshare (2025) | TGRS Research Map | TGRS