Capacitive Micromachined Ultrasonic Transducers with back-side contacts for multi-channel gas measurements

Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2025-06-17
Primary Topic
Geochemistry and Geologic Mapping
Type
article
Field-Weighted Citation Impact
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article

Capacitive Micromachined Ultrasonic Transducers with back-side contacts for multi-channel gas measurements

SPIRE - Sciences Po Institutional REpository
Geochemistry and Geologic Mapping
article

Capacitive Micromachined Ultrasonic Transducers with back-side contacts for multi-channel gas measurements

article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Openalex Percentile: Top 45%
Geochemistry and Geologic Mapping
Open Access PDFOpenAlex
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Capacitive Micromachined Ultrasonic Transducers with back-side contacts for multi-channel gas measurements · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS