TSVs mechanical stress measurements on silicon wave-guide using phase shift Interferometry
Institutions
- STMicroelectronics (Czechia) (CZ)
Publication Details
- Journal
- SPIRE - Sciences Po Institutional REpository
- Published
- 2025-09-16
- Primary Topic
- Geochemistry and Geologic Mapping
- Type
- article
- Field-Weighted Citation Impact
- 0.00