Supplemental Material

Figure S1 shows high-resolution spectra for N 1s, O1s and Si 2p for a SiNx etched in C4F6/O2/Ar plasmas with different O2 to C4F6 flow rate ratios at 70 and 120 {degree sign}C. Figure S2 shows the infrared spectra for CFx film deposited on bare ZnSe and plasma-deposited SiNx surfaces at different substrate temperatures.

Publication Details

Journal
Figshare
Published
2025-09-03
DOI
https://doi.org/10.60893/figshare.jva.29910962.v1
Primary Topic
Geochemistry and Geologic Mapping
Type
article
Field-Weighted Citation Impact
0.00
Controls
|||
ALL TIME
JAN
FEB
MAR
APR
MAY
JUN
JUL
AUG
SEP
OCT
article

Supplemental Material

Figshare
Geochemistry and Geologic Mapping
article

Supplemental Material

article en

Abstract

Figure S1 shows high-resolution spectra for N 1s, O1s and Si 2p for a SiNx etched in C4F6/O2/Ar plasmas with different O2 to C4F6 flow rate ratios at 70 and 120 {degree sign}C. Figure S2 shows the infrared spectra for CFx film deposited on bare ZnSe and plasma-deposited SiNx surfaces at different substrate temperatures.

Figshare
Openalex Percentile: Top 56%
Geochemistry and Geologic Mapping
DOISourceOpenAlex
AI Navigator

Ask Laika to Summarize, Analyze, and Connect papers live on the map.

Summarize Papers & Methodologies

Extract key findings, datasets, and comparative methods across publications.

Benchmark Rankings & Visual Analytics

Rank top research institutions, authors, funders, topics, and journals by Field-Weighted Citation Impact (FWCI) and paper volume with instant charts.

Connect Distant Disciplines

Bridge topological clusters on the map to find hidden collaborative intersections.

Supplemental Material · Figshare (2025) | TGRS Research Map | TGRS