P‐7: High‐Reliability LTPS‐TFT with Super‐Low Gate Resistivity
This study explores the adoption of low‐resistance gate wiring metals to enhance the scalability and functionality of LTPS‐TFT displays. By using aluminum (Al) as the gate metal material, we were able to reduce the resistivity of about 1/5 of the conventional level. The reliability of LTPS‐TFTs was significantly enhanced by incorporating a well‐designed light‐shield layer.
Institutions
- Japan Display (Japan) (JP)
- Mi Corporation (United States) (US)
Publication Details
- Journal
- SID Symposium Digest of Technical Papers
- Published
- 2025-06-01
- DOI
- https://doi.org/10.1002/sdtp.18456
- Primary Topic
- Geochemistry and Geologic Mapping
- Type
- article
- Field-Weighted Citation Impact
- 0.00