62‐1: <i>Distinguished Student Paper:</i> Normally Off Top‐Gate Self‐Aligned Field‐Effect Transistor Using Crystal InO <sub> <i>x</i> </sub> with Field‐Effect Mobility of Around 100 cm <sup>2</sup> /Vs

In this study, we designed and fabricated a crystal InOx‐based transistor on a 3.5th generation glass (600 mm × 720 mm) substrate line. The transistor exhibits high field‐effect mobility around 100 m 2 /Vs, an on‐state current higher than that of a low‐ temperature polysilicon‐based transistor, normally‐off characteristics, and high reliability. By combining our organic light‐emitting diode (OLED) patterning technology, we obtained an 8K4K OLED display with high luminance and low power consumption.

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Publication Details

Journal
SID Symposium Digest of Technical Papers
Published
2025-06-01
DOI
https://doi.org/10.1002/sdtp.18297
Primary Topic
Geochemistry and Geologic Mapping
Type
article
Field-Weighted Citation Impact
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article

62‐1: Distinguished Student Paper: Normally Off Top‐Gate Self‐Aligned Field‐Effect Transistor Using Crystal InO x with Field‐Effect Mobility of Around 100 cm 2 /Vs

SID Symposium Digest of Technical Papers
Geochemistry and Geologic Mapping
article

62‐1: Distinguished Student Paper: Normally Off Top‐Gate Self‐Aligned Field‐Effect Transistor Using Crystal InO x with Field‐Effect Mobility of Around 100 cm 2 /Vs

article en

Abstract

In this study, we designed and fabricated a crystal InOx‐based transistor on a 3.5th generation glass (600 mm × 720 mm) substrate line. The transistor exhibits high field‐effect mobility around 100 m 2 /Vs, an on‐state current higher than that of a low‐ temperature polysilicon‐based transistor, normally‐off characteristics, and high reliability. By combining our organic light‐emitting diode (OLED) patterning technology, we obtained an 8K4K OLED display with high luminance and low power consumption.

SID Symposium Digest of Technical PapersVol. 56(1)
Semiconductor Energy Laboratory (Japan) (JP)
Affordable and clean energy
Openalex Percentile: Top 69%
Geochemistry and Geologic Mapping
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