P‐84: The Causes and Improvement of Lens Damage in Micro‐OLED Display

In order to improve the light output efficiency of the device in Micro‐OLED, micro‐lens (Lens) are usually configured on the pixels. This paper investigates the lens damage in Micro‐OLED 4k product. We found that the cause of lens damage was insufficient evaporation of the photoresist (RP) solvent due to the low baking temperature of the Bonding Pad Open (PDO) mask, which resulted in pit‐like defects after development and lens damage during PDO etching. Ultimately, by removing the Post‐Exposure Baking(PEB) process, we reduced Lens damage to 0%.