P‐127: Transparent PZT Thin Film with High Piezoelectricity on Glass Substrates

To realize high transparency and piezoelectric micro devices, Pb(Zr,Ti)O 3 (PZT) thin film depositions, which were conducted by Sol‐Gel and Pulsed Laser Deposition(PLD) methods. This study presents the design andfabrication of multilayer thin films consisting of indium tin oxide (ITO) on glass substrates. In this study, an outstanding transmittance (85.1%) was achieved, which was fabricated by the Sol‐Gel route. The Sol‐Gel and PLD PZT piezoelectric devices had high inverse piezoelectric characteristics of |e 31,f |, 11 C/m 2 and 13 C/m 2 under 20 V peak‐to‐Peak (V pp ) voltage, respectively. It opens the way to low‐voltage and high‐piezoelectric coefficients applications for haptic devices.