P‐125: <i>WITHDRAWN:</i> Leaky Antiferroelectric Oxide TFT for Physical Reservoir Computing Devices Achieving BEOL Compatibility with Microwave Annealing

Neuromorphic devices with BEOL compatibility present promising potential for edge applications. In this study, we employed MWA to develop a leaky antiferroelectric HZO oxide TFT for BEOL applications. We formed leaky HZO with MWA at 350 °C, endowing it with short‐term memory roperties. Our leaky‐AFE oxide TFT effectively distinguished 16 reservoir states and achieved a high recognition accuracy of 91.44% in the MNIST handwritten digit dataset.

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Publication Details

Journal
SID Symposium Digest of Technical Papers
Published
2025-06-01
DOI
https://doi.org/10.1002/sdtp.18588
Primary Topic
Geochemistry and Geologic Mapping
Type
article
Field-Weighted Citation Impact
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article

P‐125: WITHDRAWN: Leaky Antiferroelectric Oxide TFT for Physical Reservoir Computing Devices Achieving BEOL Compatibility with Microwave Annealing

SID Symposium Digest of Technical Papers
Geochemistry and Geologic Mapping
article

P‐125: WITHDRAWN: Leaky Antiferroelectric Oxide TFT for Physical Reservoir Computing Devices Achieving BEOL Compatibility with Microwave Annealing

article en

Abstract

Neuromorphic devices with BEOL compatibility present promising potential for edge applications. In this study, we employed MWA to develop a leaky antiferroelectric HZO oxide TFT for BEOL applications. We formed leaky HZO with MWA at 350 °C, endowing it with short‐term memory roperties. Our leaky‐AFE oxide TFT effectively distinguished 16 reservoir states and achieved a high recognition accuracy of 91.44% in the MNIST handwritten digit dataset.

SID Symposium Digest of Technical PapersVol. 56(1)
Korea Advanced Institute of Science and Technology (KR)
Openalex Percentile: Top 69%
Geochemistry and Geologic Mapping
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P‐125: <i>WITHDRAWN:</i> Leaky Antiferroelectric Oxide TFT for Physical Reservoir Computing Devices Achieving BEOL Compatibility with Microwave Annealing · SID Symposium Digest of Technical Papers (2025) | TGRS Research Map | TGRS