94‐2: Process Development for Active‐Matrix‐Addressed Liquid‐Crystal Reconfigurable Intelligent Surfaces
This work presents the design and development of an active matrix addressed liquid crystal based RIS for 28 GHz centre frequency as well as the fabrication and characterization of a column‐ wise direct‐addressed 16x16 unit‐cell prototype. For the implementation of low loss RF electrodes, a micro‐galvanic copper deposition process has been integrated and optimized and the process compatibility with a‐Si:H TFTs has been shown.
Institutions
- University of Stuttgart (DE)
- Merck KGaA, Darmstadt (Germany) (DE)
- Institute for Mobile and Satellite Communication Technology (DE)
- Freie Universität Berlin (DE)
Publication Details
- Journal
- SID Symposium Digest of Technical Papers
- Published
- 2025-06-01
- DOI
- https://doi.org/10.1002/sdtp.18422
- Citations
- 1
- Primary Topic
- Geochemistry and Geologic Mapping
- Type
- article
- Field-Weighted Citation Impact
- 2.48