47‐2: World's First OLED Display Using 12‐inch IGZO‐on‐Si 3D Monolithic Integration

We prototyped a backplane with an IGZO‐on‐Si structure in a 12‐inch wafer production line for the first time in the world. The monolithically formed Si FETs and OSFETs in the prototyped backplane exhibited good characteristics. Using the backplane, we successfully fabricated a 3527‐ppi micro‐OLED display for AR/VR application.

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Publication Details

Journal
SID Symposium Digest of Technical Papers
Published
2025-06-01
DOI
https://doi.org/10.1002/sdtp.18240
Primary Topic
Geochemistry and Geologic Mapping
Type
article
Field-Weighted Citation Impact
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article

47‐2: World's First OLED Display Using 12‐inch IGZO‐on‐Si 3D Monolithic Integration

SID Symposium Digest of Technical Papers
Geochemistry and Geologic Mapping
article

47‐2: World's First OLED Display Using 12‐inch IGZO‐on‐Si 3D Monolithic Integration

article en

Abstract

We prototyped a backplane with an IGZO‐on‐Si structure in a 12‐inch wafer production line for the first time in the world. The monolithically formed Si FETs and OSFETs in the prototyped backplane exhibited good characteristics. Using the backplane, we successfully fabricated a 3527‐ppi micro‐OLED display for AR/VR application.

SID Symposium Digest of Technical PapersVol. 56(1)
Semiconductor Energy Laboratory (Japan) (JP), Powerchip (Taiwan) (TW)
Openalex Percentile: Top 70%
Geochemistry and Geologic Mapping
DOISourceOpenAlex
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47‐2: World's First OLED Display Using 12‐inch IGZO‐on‐Si 3D Monolithic Integration · SID Symposium Digest of Technical Papers (2025) | TGRS Research Map | TGRS