96‐1: <i>Invited Paper:</i> AI Image Technology for Fast, Cost‐Effective, and Safe Manufacturing Process

This paper describes two artificial intelligence (AI) technologies for generating and analyzing images for OLED display manufacturing. Firstly, many measurement steps are required during fabrication in order to verify TFT patterns, which leads to glass wastage while measurement recipes are generated. We demonstrate that virtual images generated by AI technology can be used to in place of real images of a glass substrate, allowing for fast and cost effective fabrication. Secondly, an automated measurement system utilizing AI is proposed. Precise measurement is required for equipment setup related to delicate processes. Our system employs segmentation AI, followed by image processing for correction, enabling precise measurements automatically. It can reduce human errors and protect engineers from harm when measuring inside equipment. Application of these two technologies has significantly enhanced the efficiency of the display manufacturing process.