P‐267: <i>Late‐News Poster:</i> Strategies to Develop Highly Reactive Red Photoresists via Modulation of the Exposure and Developing Processes

This study focuses on improving the manufacturing efficiency of thin‐film transistor liquid crystal displays (TFT‐LCD) by developing color photoresists (CPRs) with higher reactivity and faster photocuring. It was found that adjusting the composition of photoinitiators, resins, and monomers led to a fast‐curing red photoresist with high sensitivity. The study explored the effects of composition on pattern integrity, linewidth, and film thickness. By optimizing the ratio of these components, complete photocuring was achieved at an exposure energy of 30 mJ, maintaining target linewidth and minimizing undercut (approximately 0.6 µm). This approach balances photocuring and development properties, providing a strategy for creating highly reactive CPRs and guiding future photoresist development.

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Publication Details

Journal
SID Symposium Digest of Technical Papers
Published
2025-06-01
DOI
https://doi.org/10.1002/sdtp.18669
Primary Topic
Geochemistry and Geologic Mapping
Type
article
Field-Weighted Citation Impact
0.00

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article

P‐267: Late‐News Poster: Strategies to Develop Highly Reactive Red Photoresists via Modulation of the Exposure and Developing Processes

SID Symposium Digest of Technical Papers
Geochemistry and Geologic Mapping
article

P‐267: Late‐News Poster: Strategies to Develop Highly Reactive Red Photoresists via Modulation of the Exposure and Developing Processes

article en

Abstract

This study focuses on improving the manufacturing efficiency of thin‐film transistor liquid crystal displays (TFT‐LCD) by developing color photoresists (CPRs) with higher reactivity and faster photocuring. It was found that adjusting the composition of photoinitiators, resins, and monomers led to a fast‐curing red photoresist with high sensitivity. The study explored the effects of composition on pattern integrity, linewidth, and film thickness. By optimizing the ratio of these components, complete photocuring was achieved at an exposure energy of 30 mJ, maintaining target linewidth and minimizing undercut (approximately 0.6 µm). This approach balances photocuring and development properties, providing a strategy for creating highly reactive CPRs and guiding future photoresist development.

SID Symposium Digest of Technical PapersVol. 56(1)
Peking University (CN), San’an Optoelectronics (China) (CN), Peking University Shenzhen Hospital (CN)
National Natural Science Foundation of China
Industry, innovation and infrastructure
Openalex Percentile: Top 70%
Geochemistry and Geologic Mapping
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P‐267: <i>Late‐News Poster:</i> Strategies to Develop Highly Reactive Red Photoresists via Modulation of the Exposure and Developing Processes · SID Symposium Digest of Technical Papers (2025) | TGRS Research Map | TGRS