44‐4: A 100‐DPI Active‐Matrix Tactile Sensor Based on Carbon Nanotube TFT for Haptic Applications

Pressure sensing, as a crucial component of haptic or tactile sensing, plays a vital role in the areas of interactive display, robots, medical treatment, wearable electronics, etc. Active‐matrix (AM) pressure sensors draw much attention due to their low crosstalk and high resolution. Here, we proposed a novel thin‐film transistor (TFT)‐based AM tactile pressure sensor by substituting the TFT active channel with a piezoresistive semiconductor film based on carbon nanotubes, giving a highly integrated array with 100 DPI as well as a simplified fabrication process. The device can detect pressure ranging from 0.2 kPa to 90 kPa, with a sensitivity of 2.414 kPa‐1 and a perfect sensing linearity. Owning to the AM design, the resistance readout can be switched ON/OFF by a scan signal. Moreover, the sensor also presents a respectable durability. Due to the highly compact design, there is potential for expanding its application into haptic display, artificial intelligence, etc.