77‐2: Trifold OLED Display Fabricated Through Low‐Temperature Process Using Short‐Channel Top‐Gate Self‐Aligned Field‐Effect Transistor with Crystal IO
We developed a low‐temperature process for a top‐gate selfaligned FET with L = 2 μm including a crystal indium oxide active layer, and achieved a field‐effect mobility of 50 cm 2 /Vs. Using this technology, we successfully fabricated the world's first trifold OLED display using crystal indium oxide.
Institutions
- Semiconductor Energy Laboratory (Japan) (JP)
Publication Details
- Journal
- SID Symposium Digest of Technical Papers
- Published
- 2025-06-01
- DOI
- https://doi.org/10.1002/sdtp.18353
- Primary Topic
- Geochemistry and Geologic Mapping
- Type
- article
- Field-Weighted Citation Impact
- 0.00