P‐166: Driver‐Integrated Active‐Matrix Amorphous Silicon Schottky Photosensor Arrays for Display Integration

This paper shows an active‐matrix Schottky photodiode‐based image sensor. It is shown that amorphous silicon Schottky photodiodes may be favorable over pin‐photodiodes due to their simpler and highly TFT‐compatible manufacturing process, eliminating the need for a p‐doping and retaining strong device performance. The device performance is shown and evaluated with regards to different applications such as ambient light sensing as well as in‐screen fingerprint detection. An active‐matrix sensor array is shown, featuring integrated row drivers and column multiplexing to reduce external driver circuitry such as ADC channels and to provide a scalable technology.