84‐2: A Study on Black‐Matrix CMP Technology for Automotive On‐Cell Louver Micro Structure

In this study, we have investigated the charcteristics of organic black matrix(BM) chemical mechanical plarnarization(CMP). Starting from simulation based on the several parameters, we have successfully obtained process capabilities at 6G‐half glass. Experimental results suggest that the mechanism of BM CMP is more dependent upon physical effects rather than chemical reactions and the dynamics of slurry flow. Using CMP technology we developed, on‐cell‐louver(OCL) micro structure was prepared has shown the 75 % of front transmittance luminance and 3 % at the 45 cut‐off angle.