Positional Distribution Diagnosis of Argon Inductively Coupled Plasma Based on Tomographic Optical Emission Spectroscopic Measurement and Collisional-Radiative Model

トモグラフィック発光分光計測と衝突輻射モデルにもとづくアルゴン誘導結合プラズマの位置分布診断, Positional Distribution Diagnosis of Argon Inductively Coupled Plasma Based on Tomographic Optical Emission Spectroscopic Measurement and Collisional-Radiative Model

Publication Details

Journal
Tokyo Tech Research Repository (Tokyo Institute of Technology)
Published
2025-02-20
Primary Topic
Prenatal Screening and Diagnostics
Type
article
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article

Positional Distribution Diagnosis of Argon Inductively Coupled Plasma Based on Tomographic Optical Emission Spectroscopic Measurement and Collisional-Radiative Model

Tokyo Tech Research Repository (Tokyo Institute of Technology)
Prenatal Screening and Diagnostics
article

Positional Distribution Diagnosis of Argon Inductively Coupled Plasma Based on Tomographic Optical Emission Spectroscopic Measurement and Collisional-Radiative Model

article en

Abstract

トモグラフィック発光分光計測と衝突輻射モデルにもとづくアルゴン誘導結合プラズマの位置分布診断, Positional Distribution Diagnosis of Argon Inductively Coupled Plasma Based on Tomographic Optical Emission Spectroscopic Measurement and Collisional-Radiative Model

Tokyo Tech Research Repository (Tokyo Institute of Technology)
Openalex Percentile: Top 37%
Prenatal Screening and Diagnostics
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Positional Distribution Diagnosis of Argon Inductively Coupled Plasma Based on Tomographic Optical Emission Spectroscopic Measurement and Collisional-Radiative Model · Tokyo Tech Research Repository (Tokyo Institute of Technology) (2025) | TGRS Research Map | TGRS