Influence of Growth Temperature and Scandium Concentration on the Surface Oxidation of ScAlN Films Grown by Molecular Beam Epitaxy

Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2025-06-16
Primary Topic
Acoustic Wave Resonator Technologies
Type
article
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article

Influence of Growth Temperature and Scandium Concentration on the Surface Oxidation of ScAlN Films Grown by Molecular Beam Epitaxy

SPIRE - Sciences Po Institutional REpository
Acoustic Wave Resonator Technologies
article

Influence of Growth Temperature and Scandium Concentration on the Surface Oxidation of ScAlN Films Grown by Molecular Beam Epitaxy

article en

Abstract

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SPIRE - Sciences Po Institutional REpository
Openalex Percentile: Top 52%
Acoustic Wave Resonator Technologies
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Influence of Growth Temperature and Scandium Concentration on the Surface Oxidation of ScAlN Films Grown by Molecular Beam Epitaxy · SPIRE - Sciences Po Institutional REpository (2025) | TGRS Research Map | TGRS