Modeling Permittivity Measurements of Thin Film Materials Versus Film Thickness

Measured permittivity of thin film polymeric samples were substantially less for thin samples, asymptotically approaching bulk values above ~500 μm. For ~25 μm samples the observed permittivities were as much as 50% less than for bulk measurements. This behavior has been studied for four common homogeneous polymeric materials for sample thickness in the range of ~10 μm to > 1000 μm. To quantify these observations, an empirical single-parameter model was developed to correct measured permittivity of thin samples based on an effective stray capacitance in series with the samples to compensate for effects attributed to instrumentation.