Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements

トモグラフィー発光分光法およびラングミュアプローブ計測によるアルゴン二周波誘導結合プラズマの電子温度と密度の診断, Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements

Publication Details

Journal
Tokyo Tech Research Repository (Tokyo Institute of Technology)
Published
2024-11-19
Primary Topic
Astronomy and Astrophysical Research
Type
article
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article

Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements

Tokyo Tech Research Repository (Tokyo Institute of Technology)
Astronomy and Astrophysical Research
article

Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements

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Abstract

トモグラフィー発光分光法およびラングミュアプローブ計測によるアルゴン二周波誘導結合プラズマの電子温度と密度の診断, Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements

Tokyo Tech Research Repository (Tokyo Institute of Technology)
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Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements · Tokyo Tech Research Repository (Tokyo Institute of Technology) (2024) | TGRS Research Map | TGRS