KNN Lead-free biaxial piezoelectric MEMS Mirror on 200 mm Si wafer

Publication Details

Journal
SPIRE - Sciences Po Institutional REpository
Published
2024-09-01
Primary Topic
Advanced MEMS and NEMS Technologies
Type
article
Field-Weighted Citation Impact
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article

KNN Lead-free biaxial piezoelectric MEMS Mirror on 200 mm Si wafer

SPIRE - Sciences Po Institutional REpository
Advanced MEMS and NEMS Technologies
article

KNN Lead-free biaxial piezoelectric MEMS Mirror on 200 mm Si wafer

article en

Abstract

No abstract available for this paper.
SPIRE - Sciences Po Institutional REpository
Affordable and clean energy
Openalex Percentile: Top 64%
Advanced MEMS and NEMS Technologies
Open Access PDFOpenAlex
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KNN Lead-free biaxial piezoelectric MEMS Mirror on 200 mm Si wafer · SPIRE - Sciences Po Institutional REpository (2024) | TGRS Research Map | TGRS