Scalable microfabrication of graphene polymeric strain Gauge

This paper presents the fabrication and characterization of a strain gauge based on chemical vapor deposition (CVD)-grown graphene integrated to an epoxy-based, photo-patternable and flexible SU-8 cantilever for sensing applications. The fabrication process involved a standard semiconductor microfabrication process to create ser-pentine-shaped graphene and gold/graphene sensing layers on a polymeric SU-8 layer. The performance of the strain gauge was evaluated by subjecting it to controlled bending, demonstrating a gauge factor (GF) of 2.73 and fast response time (0.55 s) affirming the viability of the fabricated strain gauge for practical sensing applications.