The Use of Two-Dimensional Detectors for Snapshot and High Accuracy Imaging Ellipsometry

Ellipsometry is a powerful and sensitive optical technique used to characterize thin film thickness and optical properties by measuring changes in the polarization state of light upon reflection or transmission. This dissertation investigates novel ellipsometry configurations that use two-dimensional detectors to enhance measurement speed, spatial resolution, or accuracy of ellipsometry measurements. The study involves the development of three different ellipsometry configurations, encompassing mechanical prototypes, mathematical models, and test measurements to evaluate each system. Advisor: Jeffrey Shield