Optical Emission Spectroscopic Measurement of Atmospheric-Pressure Plasma by Continuum and Line Emissions with Collisional Radiative Model

Many studies have been reported on the application of atmospheric pressure non-equilibrium plasma to a wide range of industrial fields. However, practical methods for measuring plasma parameters such as electron temperature Te, electron density Ne, and particularly, electron energy distribution function (EEDF) have not yet been established. This presentation reports on optical emission spectroscopy (OES) method to estimate the EEDF from a continuum analysis based on the bremsstrahlung theory, a line-spectrum analysis using the collisional radiative model (CRM), and a hybrid analysis as CRM fitting with the exploratory range restricted by the continuum analysis.