Commercially integrated GaN resonators for power conversion

Micromachining provides the capability of producing micro-electro-mechanical resonators (MEMS) with micrometer footprints that are widely used for filtering, timing, and transducing applications. An emerging power electronics trend leverages piezoelectric resonators to achieve power density superior to conventional electromagnetic approaches. We identify the opportunity to leverage the piezoelectric properties of the Gallium Nitride (GaN) material used in next- generation power electronics for a fully integrated piezoelectric DC/DC converter to power on-chip loads. Finite element analysis is used to iterate on resonator implementations constrained by Interuniversity Microelectronics Centre capabilities. Figures of merit are discussed in the context of use cases in power conversion.