Recent Developments in Semiconductor Wafer Fabrication: Materials, Processes, and Innovations

The semiconductor industry plays a critical role in modern electronics, with semiconductor wafer fabrication being a fundamental process in integrated circuit (IC) production. This review explores the key materials, fabrication processes, and recent advancements in semiconductor wafer manufacturing. The study highlights the importance of materials such as silicon, gallium arsenide, and silicon carbide, along with emerging alternatives that enhance device performance. Additionally, advanced lithography techniques, including extreme ultraviolet (EUV) and deep ultraviolet (DUV) lithography, are discussed for their impact on miniaturization and transistor density. The paper also examines challenges in wafer fabrication, such as defect detection, process optimization, and sustainability concerns. Future research directions emphasize AI-driven manufacturing, automation, and the development of eco-friendly processes to improve efficiency and reduce environmental impact. The study sheds light on the consequences of the changing semiconductor wafer production environment for the future of electronics manufacturing.

Publication Details

Journal
Zenodo (CERN European Organization for Nuclear Research)
Published
2025-03-08
DOI
https://doi.org/10.5281/zenodo.14993769
Primary Topic
Silicon and Solar Cell Technologies
Type
article
Field-Weighted Citation Impact
0.00
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article

Recent Developments in Semiconductor Wafer Fabrication: Materials, Processes, and Innovations

Zenodo (CERN European Organization for Nuclear Research)
Silicon and Solar Cell Technologies
article

Recent Developments in Semiconductor Wafer Fabrication: Materials, Processes, and Innovations

article en

Abstract

The semiconductor industry plays a critical role in modern electronics, with semiconductor wafer fabrication being a fundamental process in integrated circuit (IC) production. This review explores the key materials, fabrication processes, and recent advancements in semiconductor wafer manufacturing. The study highlights the importance of materials such as silicon, gallium arsenide, and silicon carbide, along with emerging alternatives that enhance device performance. Additionally, advanced lithography techniques, including extreme ultraviolet (EUV) and deep ultraviolet (DUV) lithography, are discussed for their impact on miniaturization and transistor density. The paper also examines challenges in wafer fabrication, such as defect detection, process optimization, and sustainability concerns. Future research directions emphasize AI-driven manufacturing, automation, and the development of eco-friendly processes to improve efficiency and reduce environmental impact. The study sheds light on the consequences of the changing semiconductor wafer production environment for the future of electronics manufacturing.

Zenodo (CERN European Organization for Nuclear Research)
Openalex Percentile: Top 54%
Silicon and Solar Cell Technologies
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Recent Developments in Semiconductor Wafer Fabrication: Materials, Processes, and Innovations · Zenodo (CERN European Organization for Nuclear Research) (2025) | TGRS Research Map | TGRS