DEPOSITION OF METAL OXIDES (MO-CU-TI-FE) USING THE CATHODIC CAGE DEPOSITION TECHNIQUE

This study analysed the formation of metal oxide films (Mo-Cu-Ti-Fe) using the cathodic cage deposition method. By varying the cage cover, films with different properties and compositions were produced. These films were analysed using scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy (EDS), X-ray diffractometry (XRD) and roughness measurements. The results showed that films with good adhesion to the substrate were formed, as well as the presence of crystalline phases typical of the deposited oxides. These characteristics indicate that the cathodic cage deposition method is suitable for producing high-quality thin films, making it a promising alternative for applications in catalysis, sensors and electronic devices.