Preparation and characterization of Pd/porous Ta/Ta composite membrane

The porous Ta membrane was prepared on the surface of Ta foils by spraying and sintering. Subsequently, the Pd/porousTa/Ta composite membrane was prepared by electroless Pd plating processes using the porous Ta/Ta as the composite substrate. The effect of sintering temperature on the morphology of porous tantalum films was studied, and the growth behavior of Pd films was analyzed. In the results, the sintering temperature has a significant impact on the structure of porous Ta membrane. The porous Ta membrane with the well-developed sintering neck can be obtained by sintering at 1700 ℃ for 2 h. The electroless plating time has a significant effect on the Pd membrane on the surface of porous Ta membrane. Moreover, due to the complex surface structure of porous Ta membrane, it is difficult to obtain the uniform and dense Pd membrane on the surface of porous Ta membrane.

Publication Details

Journal
SHILAP Revista de lepidopterología
Published
2024-12-01
DOI
https://doi.org/10.19591/j.cnki.cn11-1974/tf.2023030002
Primary Topic
Copper Interconnects and Reliability
Type
article
Field-Weighted Citation Impact
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article

Preparation and characterization of Pd/porous Ta/Ta composite membrane

SHILAP Revista de lepidopterología
Copper Interconnects and Reliability
article

Preparation and characterization of Pd/porous Ta/Ta composite membrane

article en

Abstract

The porous Ta membrane was prepared on the surface of Ta foils by spraying and sintering. Subsequently, the Pd/porousTa/Ta composite membrane was prepared by electroless Pd plating processes using the porous Ta/Ta as the composite substrate. The effect of sintering temperature on the morphology of porous tantalum films was studied, and the growth behavior of Pd films was analyzed. In the results, the sintering temperature has a significant impact on the structure of porous Ta membrane. The porous Ta membrane with the well-developed sintering neck can be obtained by sintering at 1700 ℃ for 2 h. The electroless plating time has a significant effect on the Pd membrane on the surface of porous Ta membrane. Moreover, due to the complex surface structure of porous Ta membrane, it is difficult to obtain the uniform and dense Pd membrane on the surface of porous Ta membrane.

SHILAP Revista de lepidopterología
Openalex Percentile: Top 76%
Copper Interconnects and Reliability
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Preparation and characterization of Pd/porous Ta/Ta composite membrane · SHILAP Revista de lepidopterología (2024) | TGRS Research Map | TGRS