Single-Shot 3D Imaging Meta-Microscope

Three-dimensional\n(3D) imaging enables high-precision and high-resolution\naxial positioning, which is crucial for biological imaging, semiconductor\ndefect monitoring, and other applications. Conventional implementations\nrely on bulky optical elements or scanning mechanisms, resulting in\nlow speed and complicated setups. Here, we generate the double-helix\n(DH) point spread function with an all-dielectric metasurface and\nthus innovate the 3D imaging microscope (hence dubbed meta-microscope),\nboth in 4f and 2f imaging systems. The 4f-meta-microscope with a numerical\naperture of 0.7 achieves an axial localization accuracy below 0.12\nμm within a 15.47 μm detection range, while the 2f-DH\nmeta-microscope with a numerical aperture of 0.3 shows a 1.12 μm\naccuracy within a 227.33 μm range. We also demonstrate single-shot\nand accurate 3D biological imaging of the mouse kidney tissue and\npeach anther, providing a comprehensive and efficient approach for\n3D bioimaging and other applications through a single-shot 3D meta-microscope.